蓝宝石基板应力去除热处理炉 Sapphire Substrate Annealing Furnace 5 吋高真空高纯度升华系统 Type:UST (OLED and High vacuum high purity sublimation system) 1700℃升降炉 (1700℃ bottom up furnace) 1250℃侧开炉 Type:LF-E (1250℃ box furnace) 1450℃侧开炉 (1450℃ box furnace) 1700℃侧开炉 Type:LF-F (1700℃ box furnace) N2/H2 气氛还原烧结炉 (N2/H2 atmosphere furnace) 电极烧付炉 (belt conveyor furnace) 1 Zone 管型炉 Type:LF-T (tube furnace) 3 Zone 1700℃水平管型炉 Type:LF-T (1700℃ 3 Zone Tube Furnace)