藍寶石基板應力去除熱處理爐 Sapphire Substrate Annealing Furnace 5 吋高真空高純度昇華系統 Type:UST(OLED and High vacuum high purity sublimation system) 1700℃昇降式燒結爐 Type:LF-410 (1700℃ bottom up furnace) 1250℃側開爐Type:LF-E (1250℃ box furnace) 1450℃側開爐Type:LF-S (1450℃ box furnace) 1700℃側開爐Type:LF-F (1700℃ box furnace) N2/H2 氣氛還原燒結爐(N2/H2 atmosphere furnace) 電極燒付爐 (belt conveyor furnace) 1 Zone管型爐 Type:LF-T (tube furnace) 3 Zone 1700℃水平管型爐 Type:LF-T (1700℃ 3 Zone Tube Furnace)